更新时间: 2024-05-19
一套总调PLC完成大闭环控制,调节所有的整流机组,大闭环总调的PID输出作为整流机组小闭环PID的给定值,使所有机组的直流输出相同。13748 APPLIED MATERIALS FLTRHSG #10 3/4NPT 1-10GPM POLYPROPYLENE 4020-013012010 APPLIED MATERIALS VALVE MNL ANGLE IN-LINE 2.75CF 1.5OD POR 3870-0228616747 APPLIED MATERIALS C/A GAS BOX INTLKS,SERIPLEX,55'',IPS W/AU 0150-1065210560 CKD CHEMICAL VALVE AMD012-8US-02XS6356 HORIBA-STEC MFC SEC-Z10DW SEC-Z12DWMO15517 LAM RESEARCH 5" DIFFUSER CATHODE 716-006446-00121246 BROOKS KIT, ZERO FIXTURE, 4-AXIS, RAZOR 1749845897 ADVANCED ENERGY MAGENTRON SLAVE POWER SUPPLY MDX-10K6503 KOFLOC MFC 3440 SERIES MFC 344018102 TOKUYAMA IPA GAS MONITOR FTA-500019856 LAMB ELECTRIC AMETEK VACUUM MOTOR 117123-135286 HAM-LET DIAPHRAGM VALVE HMS20 4VKLQLD